AR+ LASER-INDUCED CHEMICAL ETCHING OF MOLYBDENUM IN CHLORINE ATMOSPHERE

被引：9

作者：

MOGYOROSI, P

PIGLMAYER, K

BAUERLE, D

机构：

来源：

SURFACE SCIENCE | 1989年 / 208卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(89)90047-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：232 / 244

页数：13

共 16 条

[1]

BAUERLE D, 1986, SPRINGER SERIES MATE, V1

[2]

BRESLER PI, 1971, J PRIKL SPECTR, V14, P728

[3] LASER-INDUCED GAS-SURFACE INTERACTIONS [J].

Chuang, T. J. .

SURFACE SCIENCE REPORTS, 1983, 3 (01) :1-105

[4]

HUBMER GF, COMMUNICATION

[5] HIGHLY DAMAGE-RESISTANT MO MIRROR FOR HIGH-POWER TEA CO2-LASER SYSTEMS [J].

ICHIKAWA, Y ;

YOSHIDA, K ;

TSUNAWAKI, Y ;

YAMANAKA, M ;

YAMANAKA, T ;

YAMANAKA, C ;

OKAMOTO, H ;

MATSUSUE, N ;

KITAJIMA, K .

APPLIED OPTICS, 1987, 26 (17) :3671-3675

[6]

KULLMER R, 1988, IN PRESS APPL PHYS A, V47

[7] CHLORINATION KINETICS OF TUNGSTEN, MOLYBDENUM, AND THEIR ALLOYS [J].

LANDSBERG, A ;

HOATSON, CL ;

BLOCK, FE .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (08) :1331-+

[8] FOCUS-POSITION SENSING USING LASER SPECKLE [J].

MCLAUGHLIN, JL .

APPLIED OPTICS, 1979, 18 (07) :1042-1045

[9] LASER-INDUCED CHEMICAL ETCHING OF SILICON IN CHLORINE ATMOSPHERE .2. CONTINUOUS IRRADIATION [J].

MOGYOROSI, P ;

PIGLMAYER, K ;

KULLMER, R ;

BAUERLE, D .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :293-299

[10] KINETICS OF ATTACK OF MOLYBDENUM BY DISSOCIATED CHLORINE [J].

ROSNER, DE ;

ALLENDOR.HD .

JOURNAL OF PHYSICAL CHEMISTRY, 1965, 69 (12) :4290-&

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