A STUDY ON FIELD-EMISSION ARRAY PRESSURE SENSORS

被引：16

作者：

LEE, HC

HUANG, RS

机构：

[1] Department of Electronics, School of Electrical Engineering, The University of New South Wales, Kensington, Sydney

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 34卷 / 02期

关键词：

D O I：

10.1016/0924-4247(92)80185-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In view of the specific advantages of using vacuum as the device medium and a field-emission cathode as electron source, a renewed interest in vacuum microelectronics utilizing advanced IC technology is emerging. This paper presents an application of field-emission arrays in a novel pressure sensor. Both cone-shaped and wedge-shaped emitter arrays are studied. Various wet and dry etching techniques for forming the emitter arrays are compared. A combined wet/dry fabrication process is developed to achieve array uniformity and reproducibility. The characteristics of a pressure sensor with an ideal field-emission array are simulated, and methods to take into consideration the non-uniformity of array tips, an inevitable result of the fabrication process, are also discussed. The performance of a fabricated pressure sensor with a cone-shaped emitter array is evaluated.

引用

页码：137 / 154

页数：18

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