THEORETICAL-STUDY OF AL OVERLAYERS ON SI(111)

被引:20
作者
ZHANG, HI
SCHLUTER, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期
关键词
D O I
10.1116/1.569793
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1384 / 1388
页数:5
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