AVALANCHE BREAKDOWN IN EPITAXIAL SIC P-N JUNCTIONS

被引:27
作者
VANOPDORP, C
VRAKKING, J
机构
[1] Philips Research Laboratories, N. V. Philips Gloeilampenfabrieken, Eindhoven
关键词
D O I
10.1063/1.1657980
中图分类号
O59 [应用物理学];
学科分类号
摘要
The reverse current-voltage characteristics of epitaxial SiC p-n junctions were investigated. After electrolytic etching the junctions showed sharp breakdown. The largest value found for the maximum field at breakdown is 5×106 V/cm. Microplasma pulses were observed analogous to but three orders-of-magnitude smaller than those hitherto reported for other materials. © 1969 The American Institute of Physics.
引用
收藏
页码:2320 / +
页数:1
相关论文
共 8 条
[1]   ETCHING OF ALPHA-SILICON CARBIDE [J].
BRANDER, RW ;
BOUGHEY, AL .
BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (07) :905-&
[2]   VISIBLE LIGHT EMISSION AND MICROPLASMA PHENOMENA IN SILICON P-N JUNCTION .1. [J].
KIKUCHI, M ;
TACHIKAWA, K .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1960, 15 (05) :835-848
[3]  
KNIPPENBERG WF, TO BE PUBLISHED
[4]  
KRESSEL H, 1967, RCA REV, V28, P175
[5]   THEORY OF MICROPLASMA INSTABILITY IN SILICON [J].
MCINTYRE, RJ .
JOURNAL OF APPLIED PHYSICS, 1961, 32 (06) :983-&
[6]   AVALANCHE BREAKDOWN VOLTAGES OF ABRUPT AND LINEARLY GRADED P-N JUNCTIONS IN GE SI GAAS AND GAP - (DOPANT EFFECTS IMPURITY EFFECTS T) [J].
SZE, SM ;
GIBBONS, G .
APPLIED PHYSICS LETTERS, 1966, 8 (05) :111-&
[7]  
THORNTON PR, 1967, PHYSICS ELECTROLUMIN, pCH5
[8]   EVALUATION OF DOPING PROFILES FROM CAPACITANCE MEASUREMENTS [J].
VANOPDORP, C .
SOLID-STATE ELECTRONICS, 1968, 11 (04) :397-+