ELECTROMIGRATION IN AL/CU/AL FILMS OBSERVED BY TRANSMISSION ELECTRON-MICROSCOPY

被引：25

作者：

HOROWITZ, SJ

BLECH, IA

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING | 1972年 / 10卷 / 03期

关键词：

D O I：

10.1016/0025-5416(72)90082-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：169 / &

共 14 条

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