RAPID THERMAL-OXIDATION OF SILICON MONOXIDE

被引：21

作者：

FOGARASSY, E

SLAOUI, A

FUCHS, C

REGOLINI, JL

机构：

来源：

关键词：

D O I：

10.1063/1.98433

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：337 / 339

页数：3

共 11 条

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