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STUDY OF THE PHOSPHINE PLASMA DECOMPOSITION AND ITS FORMATION BY ABLATION OF RED PHOSPHORUS IN HYDROGEN PLASMA

被引：28
作者：
BRUNO, G
LOSURDO, M
CAPEZZUTO, P
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1995年 / 13卷 / 02期
关键词：
D O I：
10.1116/1.579364
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：349 / 358
页数：10
相关论文
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