STATUS-REPORT ON X-RAY-LITHOGRAPHY

[1] BETZ H, 1986, 30TH P INT S EL ION

[2] Cerrina F., 1985, Microcircuit Engineering 84. International Conference Proceedings, P297

[3] SYNCHROTRON-RADIATION-INDUCED SURFACE NITRIDATION OF SILICON AT ROOM-TEMPERATURE [J]. APPLIED PHYSICS LETTERS, 1987, 50 (09) : 533 - 534

[4] SYNCHROTRON RADIATION X-RAY LITHOGRAPHY BEAM LINE OF NOVEL DESIGN. [J]. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1984, 3 (01): : 227 - 231

[5] CERRINA F, 1987, SPIE, V773, P30

[6] FENCIL CR, 1982, P SOC PHOTO-OPT INST, V333, P100, DOI 10.1117/12.933419

[7] DESIGN PARAMETERS FOR A SMALL STORAGE RING OPTIMIZED AS AN X-RAY-LITHOGRAPHY SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1257 - 1261

[8] GROBMAN WD, 1983, HDB SYNCHROTRON RAD, V1, P1131

[9] GUCKEL H, 1985, J APPL PHYS, V57, P212

[10] GUCKEL H, UNPUB

[1] BETZ H, 1986, 30TH P INT S EL ION

[2] Cerrina F., 1985, Microcircuit Engineering 84. International Conference Proceedings, P297

[3] SYNCHROTRON-RADIATION-INDUCED SURFACE NITRIDATION OF SILICON AT ROOM-TEMPERATURE [J]. APPLIED PHYSICS LETTERS, 1987, 50 (09) : 533 - 534

[4] SYNCHROTRON RADIATION X-RAY LITHOGRAPHY BEAM LINE OF NOVEL DESIGN. [J]. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1984, 3 (01): : 227 - 231

[5] CERRINA F, 1987, SPIE, V773, P30

[6] FENCIL CR, 1982, P SOC PHOTO-OPT INST, V333, P100, DOI 10.1117/12.933419

[7] DESIGN PARAMETERS FOR A SMALL STORAGE RING OPTIMIZED AS AN X-RAY-LITHOGRAPHY SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1257 - 1261

[8] GROBMAN WD, 1983, HDB SYNCHROTRON RAD, V1, P1131

[9] GUCKEL H, 1985, J APPL PHYS, V57, P212

[10] GUCKEL H, UNPUB