DESIGN PARAMETERS FOR A SMALL STORAGE RING OPTIMIZED AS AN X-RAY-LITHOGRAPHY SOURCE

[1] CALCULATION OF THE OPTIMUM ELECTRON-ENERGY OF A DEDICATED STORAGE RING FOR X-RAY-LITHOGRAPHY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) : 693 - 698

[2] FAY B, 1978, MICROCIRCUIT ENG, P323

[3] GROBMAN W, 1983, HDB SYNCHROTRON RAD

[4] Grobman W. D., 1980, International Electron Devices Meeting. Technical Digest, P415

[5] DESIGN AND PERFORMANCE OF AN X-RAY-LITHOGRAPHY BEAM LINE AT A STORAGE RING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1262 - 1266

[6] HEUBERGER A, 1980, FESTKORPER PROBLEME, V19, P259

[7] JAHNKE A, 1981, TU MUNCHEN INTERNAL

[8] SILVERMAN JP, 1983, P SPIE, V393

[9] X-RAY-LITHOGRAPHY - A REVIEW AND ASSESSMENT OF FUTURE APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 533 - 535

[10] HIGH-RESOLUTION PATTERN REPLICATION USING SOFT X-RAYS [J]. ELECTRONICS LETTERS, 1972, 8 (04) : 102 - &

[1] CALCULATION OF THE OPTIMUM ELECTRON-ENERGY OF A DEDICATED STORAGE RING FOR X-RAY-LITHOGRAPHY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (04) : 693 - 698

[2] FAY B, 1978, MICROCIRCUIT ENG, P323

[3] GROBMAN W, 1983, HDB SYNCHROTRON RAD

[4] Grobman W. D., 1980, International Electron Devices Meeting. Technical Digest, P415

[5] DESIGN AND PERFORMANCE OF AN X-RAY-LITHOGRAPHY BEAM LINE AT A STORAGE RING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1262 - 1266

[6] HEUBERGER A, 1980, FESTKORPER PROBLEME, V19, P259

[7] JAHNKE A, 1981, TU MUNCHEN INTERNAL

[8] SILVERMAN JP, 1983, P SPIE, V393

[9] X-RAY-LITHOGRAPHY - A REVIEW AND ASSESSMENT OF FUTURE APPLICATIONS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 533 - 535

[10] HIGH-RESOLUTION PATTERN REPLICATION USING SOFT X-RAYS [J]. ELECTRONICS LETTERS, 1972, 8 (04) : 102 - &