NEW WINDOW-STRUCTURE INGAALP VISIBLE-LIGHT LASER-DIODES BY SELF-SELECTIVE ZN DIFFUSION-INDUCED DISORDERING

被引:29
作者
ITAYA, K
ISHIKAWA, M
HATAKOSHI, G
UEMATSU, Y
机构
[1] Research and Development Center, Toshiba Corporation, Saiwai-ku, Kawasaki
关键词
D O I
10.1109/3.89969
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We investigated the behavior of Zn diffusion in InGaAlP double heterostructures during a second MOCVD growth, and found that the behavior of Zn diffusion strongly depended on the presence of an n-GaAs capping layer. We designed a new process for InGaAlP window-structure InGaAlP laser diodes using this unique diffusion behavior and disordering of a natural superlattice. A window structure realizing a high power operation has been successfully fabricated without any complicated process. A maximum output power above 80 mW has been obtained for CW operation, and 400 mW for pulsed operation.
引用
收藏
页码:1496 / 1500
页数:5
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