4X10(5) CM(2) V(-1) S(-1) PEAK ELECTRON MOBILITIES IN GAAS GROWN BY SOLID SOURCE MBE WITH AS2

被引:17
作者
STANLEY, CR [1 ]
HOLLAND, MC [1 ]
KEAN, AH [1 ]
CHAMBERLAIN, JM [1 ]
GRIMES, RT [1 ]
STANAWAY, MB [1 ]
机构
[1] UNIV NOTTINGHAM,DEPT PHYS,NOTTINGHAM NG7 2RD,ENGLAND
关键词
D O I
10.1016/0022-0248(91)90939-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A detailed study into the molecular beam epitaxy of high purity n-GaAs with arsenic dimers has been undertaken, culminating in the growth of a layer with a peak mobility of almost-equal-to 4.0 x 10(5) cm2 V-1 s-1 at 28-40 K, the highest ever recorded in bulk GaAs.
引用
收藏
页码:14 / 19
页数:6
相关论文
共 18 条
[1]   THE INFLUENCE OF GROWTH-CONDITIONS ON SULFUR INCORPORATION IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
ANDREWS, DA ;
HECKINGBOTTOM, R ;
DAVIES, GJ .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4421-4425
[2]   FAR-INFRARED STUDIES OF CENTRAL-CELL STRUCTURE OF SHALLOW DONORS IN GAAS AND INP [J].
ARMISTEAD, CJ ;
KNOWLES, P ;
NAJDA, SP ;
STRADLING, RA .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1984, 17 (35) :6415-6434
[3]   DETERMINATION OF DONOR AND ACCEPTOR IMPURITY CONCENTRATIONS IN N-INP AND N-GAAS [J].
BENZAQUEN, M ;
MAZURUK, K ;
WALSH, D ;
SPRINGTHORPE, AJ ;
MINER, C .
JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (02) :111-117
[4]   EFFECT OF ARSENIC SOURCE ON THE GROWTH OF HIGH-PURITY GAAS BY MOLECULAR-BEAM EPITAXY [J].
CHAND, N ;
MILLER, RC ;
SERGENT, AM ;
SPUTZ, SK ;
LANG, DV .
APPLIED PHYSICS LETTERS, 1988, 52 (20) :1721-1723
[5]   SURFACE AND INTERFACE DEPLETION CORRECTIONS TO FREE CARRIER-DENSITY DETERMINATIONS BY HALL MEASUREMENTS [J].
CHANDRA, A ;
WOOD, CEC ;
WOODARD, DW ;
EASTMAN, LF .
SOLID-STATE ELECTRONICS, 1979, 22 (07) :645-650
[6]   CHARACTERIZATION OF HIGH-PURITY GAAS FILMS GROWN BY MOLECULAR-BEAM EPITAXY FROM A SOLID AS CRACKER [J].
CHOW, R ;
FERNANDEZ, R ;
ATCHLEY, D ;
CHAN, K ;
BLISS, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (02) :163-167
[7]  
CHOW R, 1987, VARIAN MBE PROCESS T
[8]   SHALLOW DONORS IN VERY PURE GAAS GROWN BY GAS SOURCE MOLECULAR-BEAM EPITAXY [J].
CUNNINGHAM, JE ;
CHIU, TH ;
TIMP, G ;
AGYEKUM, E ;
TSANG, WT .
APPLIED PHYSICS LETTERS, 1988, 53 (14) :1285-1287
[9]   GROWTH OF AL0.3GA0.7AS BY MOLECULAR-BEAM EPITAXY IN THE FORBIDDEN TEMPERATURE-RANGE USING AS-2 [J].
ERICKSON, LP ;
MATTORD, TJ ;
PALMBERG, PW ;
FISCHER, R ;
MORKOC, H .
ELECTRONICS LETTERS, 1983, 19 (16) :632-633
[10]   GAAS SUBSTRATE PREPARATION FOR OVAL-DEFECT ELIMINATION DURING MBE GROWTH [J].
FRONIUS, H ;
FISCHER, A ;
PLOOG, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (02) :L137-L138