FABRICATION OF PERIODIC SUBMICRON DOT STRUCTURES OF N-INP BY LASER-INDUCED SURFACE ELECTROMAGNETIC-WAVE ETCHING

被引：3

作者：

KUMAGAI, H ^{[1
]}

EZAKI, M ^{[1
]}

TOYODA, K ^{[1
]}

OBARA, M ^{[1
]}

机构：

[1] KEIO UNIV,DEPT ELECT ENGN,KOHOKU KU,YOKOHAMA,KANAGAWA 223,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1992年 / 31卷 / 7B期

关键词：

LASER; SURFACE ELECTROMAGNETIC WAVES; ETCHING; DOTS; HOLOGRAPHIC EXPOSURE;

D O I：

10.1143/JJAP.31.L928

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Periodic submicron dot structures were fabricated by laser-induced surface electromagnetic wave etching of indium phosphide substrates. The shape of the dot was observed as a cone whose diameter at the half maximum was about 0.2-mu-m. Periods along two perpendicular axes were 0.38-mu-m and 0.57-mu-m, respectively. The periods were nearly in agreement with the calculation.

引用

页码：L928 / L930

页数：3

共 15 条

[1] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[2] STIMULATED SURFACE-PLASMA-WAVE SCATTERING AND GROWTH OF A PERIODIC STRUCTURE IN LASER-PHOTODEPOSITED METAL-FILMS
BRUECK, SRJ
EHRLICH, DJ
[J]. PHYSICAL REVIEW LETTERS, 1982, 48 (24) : 1678 - 1681
[3] ONE-DIMENSIONAL ELECTRONIC SYSTEMS IN ULTRAFINE MESA-ETCHED SINGLE AND MULTIPLE QUANTUM WELL WIRES
DEMEL, T
HEITMANN, D
GRAMBOW, P
PLOOG, K
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (22) : 2176 - 2178
[4] TIME-RESOLVED MEASUREMENTS OF STIMULATED SURFACE POLARITON WAVE SCATTERING AND GRATING FORMATION IN PULSED-LASER-ANNEALED GERMANIUM
EHRLICH, DJ
BRUECK, SRJ
TSAO, JY
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (07) : 630 - 633
[5] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243
[6] SURFACE RIPPLES ON SILICON AND GALLIUM-ARSENIDE UNDER PICOSECOND LASER ILLUMINATION
FAUCHET, PM
SIEGMAN, AE
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (09) : 824 - 826
[7] CO2 LASER-PRODUCED RIPPLE PATTERNS ON NIXP1-X SURFACES
ISENOR, NR
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (03) : 148 - 150
[8] NONLINEAR GROWTH OF PERIODIC RIPPLE STRUCTURES WITH DIFFERENT SPATIAL PERIODS IN LASER ETCHING OF GAAS
KUMAGAI, H
MACHIDA, H
TOYODA, K
TANAKA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11B): : 3186 - 3189
[9] EXPONENTIAL-GROWTH OF PERIODIC SURFACE RIPPLES GENERATED IN LASER-INDUCED ETCHING OF GAAS
KUMAGAI, H
TOYODA, K
MACHIDA, H
TANAKA, S
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (23) : 2974 - 2976
[10] PERIODIC REGROWTH PHENOMENA PRODUCED BY LASER ANNEALING OF ION-IMPLANTED SILICON
LEAMY, HJ
ROZGONYI, GA
SHENG, TT
CELLER, GK
[J]. APPLIED PHYSICS LETTERS, 1978, 32 (09) : 535 - 537

← 1 2 →