HIGH-FLUENCE ION DAMAGE EFFECTS IN AR-IMPLANTED (INGA)AS/GAAS STRAINED-LAYER SUPERLATTICES

被引:7
作者
MYERS, DR
ARNOLD, GW
HILLS, CR
DAWSON, LR
DOYLE, BL
机构
关键词
D O I
10.1063/1.98823
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:820 / 822
页数:3
相关论文
共 15 条
[1]  
ARNOLD GW, 1986, DEC P MAT RES SOC S
[2]  
CAMRAS MD, 1983, I PHYSICS C SERIES, V65, P233
[3]   SENSITIVE TECHNIQUE FOR STUDYING ION-IMPLANTATION DAMAGE [J].
EERNISSE, EP .
APPLIED PHYSICS LETTERS, 1971, 18 (12) :581-&
[4]   DEPENDENCE OF CRITICAL LAYER THICKNESS ON STRAIN FOR INXGA1-XAS/GAAS STRAINED-LAYER SUPERLATTICES [J].
FRITZ, IJ ;
PICRAUX, ST ;
DAWSON, LR ;
DRUMMOND, TJ ;
LAIDIG, WD ;
ANDERSON, NG .
APPLIED PHYSICS LETTERS, 1985, 46 (10) :967-969
[5]   DETERMINATION OF LATTICE-CONSTANT OF EPITAXIAL LAYERS OF III-V COMPOUNDS [J].
HORNSTRA, J ;
BARTELS, WJ .
JOURNAL OF CRYSTAL GROWTH, 1978, 44 (05) :513-517
[6]   ZINC-IMPLANTATION-DISORDERED (INGA)AS/GAAS STRAINED-LAYER SUPERLATTICE DIODES [J].
MYERS, DR ;
ARNOLD, GW ;
ZIPPERIAN, TE ;
DAWSON, LR ;
BIEFELD, RM ;
FRITZ, IJ ;
BARNES, CE .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) :1131-1134
[7]   TEMPERATURE-DEPENDENT DAMAGE PRODUCTION IN ION-IMPLANTED STRAINED-LAYER SUPERLATTICES [J].
MYERS, DR ;
ARNOLD, GW ;
DAWSON, LR ;
BIEFELD, RM ;
HILLS, CR ;
DOYLE, BL .
APPLIED PHYSICS LETTERS, 1987, 51 (07) :517-519
[8]   CHARACTERIZATION OF ION-IMPLANTATION DOPING OF STRAINED-LAYER SUPERLATTICES .1. STRUCTURAL-PROPERTIES [J].
MYERS, DR ;
PICRAUX, ST ;
DOYLE, BL ;
ARNOLD, GW ;
BIEFELD, RM .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (10) :3631-3640
[9]  
MYERS DR, 1985, NUCL INSTRUM METHO B, V10, P756
[10]  
NEUMAN DA, 1985, MATERIALS RES SOC S, V37, P47