SPIN-ON SOURCE FOR ZINC DIFFUSION IN (100) GALLIUM ANTIMONIDE

被引：2

作者：

HEINZ, C

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 01期

关键词：

D O I：

10.1149/1.2095567

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：250 / 252

页数：3

共 12 条

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[8]

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[9] MEASUREMENT OF THE DEPT OF DIFFUSED LAYERS IN SILICON BY THE GROOVING METHOD [J].

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[10] SPUN ON ARSENOSILICA FILMS AS SOURCES FOR SHALLOW ARSENIC DIFFUSIONS WITH HIGH SURFACE CONCENTRATION [J].

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