ELECTRON KINETICS OF COLLISION DOMINATED RF BULK PLASMA IN CO - THE ROLE OF 2ND-KIND COLLISIONS

被引：5

作者：

CAPITELLI, M ^{[1
]}

CELIBERTO, R ^{[1
]}

GORSE, C ^{[1
]}

WINKLER, R ^{[1
]}

WILHELM, J ^{[1
]}

机构：

[1] AKAD WISSENSCH DDR,ZENT INST ELEKTRONENPHYS,BEREICH GASENTLADUNGSPHYS,GREIFSWALD,GER DEM REP

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1988年 / 8卷 / 02期

关键词：

D O I：

10.1007/BF01016156

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：175 / 188

页数：14

共 12 条

[1]

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[2]

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[3]

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[5]

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[7] ION DYNAMICS OF RF PLASMAS AND PLASMA SHEATHS - A TIME-RESOLVED SPECTROSCOPIC STUDY [J].

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DONNELLY, VM ;

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[8]

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[9]

WAGNER SD, 1978, SOV PHYS TECH PHYS, V23, P665

[10] ELECTRON KINETICS OF WEAKLY IONIZED COLLISION-DOMINATED RF PLASMAS IN CO [J].

WINKLER, R ;

CAPITELLI, M ;

DILONARDO, M ;

GORSE, C ;

WILHELM, J .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1986, 6 (04) :437-456

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