SURFACE RELIEF GRATINGS OF 3200-A-PERIOD FABRICATION TECHNIQUES AND INFLUENCE ON THIN-FILM GROWTH

被引：14

作者：

FLANDERS, DC

SMITH, HI

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.569722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1001 / 1003

页数：3

共 16 条

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[2]

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[3] SURFACE RELIEF STRUCTURES WITH LINEWIDTHS BELOW 2000A [J].

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APPLIED PHYSICS LETTERS, 1978, 32 (02) :112-114

[4] POLYIMIDE MEMBRANE X-RAY LITHOGRAPHY MASKS - FABRICATION AND DISTORTION MEASUREMENTS [J].

FLANDERS, DC ;

SMITH, HI .

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[5]

FLANDERS DC, 1978, THESIS MIT

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FLANDERS DC, 1976, SOLID STATE RES REPO, P51

[7] ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING - EXPERIMENT [J].

HAWRYLUK, RJ ;

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HAWRYLUK, AM .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) :2528-2537

[8]

LEHMANN HE, UNPUBLISHED

[9] REDEPOSITION - SERIOUS PROBLEM IN RF SPUTTER ETCHING OF STRUCTURES WITH MICRONMETER DIMENSIONS [J].

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[10]

MAISSEL L, 1970, HDB THIN FILM TECHNO, pCH8

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