PROPERTIES OF MAGNETRON SPUTTERED HYDROGENATED AMORPHOUS-SILICON

被引：13

作者：

STEIN, HJ

PEERCY, PS

PECKERAR, M

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1981年 / 10卷 / 04期

关键词：

D O I：

10.1007/BF02660132

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：797 / 810

页数：14

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