SCALING DOWN MNOS NON-VOLATILE MEMORY DEVICES

被引:17
作者
YATSUDA, Y [1 ]
HAGIWARA, T [1 ]
MINAMI, SI [1 ]
KONDO, R [1 ]
UCHIDA, K [1 ]
UCHIUMI, K [1 ]
机构
[1] HITACHI LTD,MASUSHI WORKS,KODAIRA,TOKYO 187,JAPAN
关键词
D O I
10.7567/JJAPS.21S1.85
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:85 / 90
页数:6
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