RAPID GROWTH OF AIN FILMS BY PARTICLE PRECIPITATION-AIDED CHEMICAL VAPOR-DEPOSITION

被引：12

作者：

INAGAKI, T

KOMIYAMA, H

机构：

来源：

KAGAKU KOGAKU RONBUNSHU | 1989年 / 15卷 / 04期

关键词：

D O I：

10.1252/kakoronbunshu.15.849

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

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页码：849 / 856

页数：8

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