QUANTITATIVE HYDROGEN DEPTH-PROFILING USING SIMS

被引：16

作者：

LUNDQUIST, TR ^{[1
]}

BURGNER, RP ^{[1
]}

SWANN, PR ^{[1
]}

TSONG, IST ^{[1
]}

机构：

[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802

来源：

APPLIED SURFACE SCIENCE | 1981年 / 7卷 / 1-2期

关键词：

D O I：

10.1016/0378-5963(81)90055-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：2 / 6

页数：5

共 9 条

[1] HYDROGEN CONCENTRATION PROFILES IN QUARTZ DETERMINED BY A NUCLEAR-REACTION TECHNIQUE
CLARK, GJ
WHITE, CW
ALLRED, DD
APPLETON, BR
TSONG, IST
[J]. PHYSICS AND CHEMISTRY OF MINERALS, 1978, 3 (02) : 199 - 211
[2] USE OF NUCLEAR-REACTIONS AND SIMS FOR QUANTITATIVE DEPTH PROFILING OF HYDROGEN IN AMORPHOUS SILICON
CLARK, GJ
WHITE, CW
ALLRED, DD
APPLETON, BR
MAGEE, CW
CARLSON, DE
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (09) : 582 - 585
[3] NEW PRECISION TECHNIQUE FOR MEASURING CONCENTRATION VERSUS DEPTH OF HYDROGEN IN SOLIDS
LANFORD, WA
TRAUTVETTER, HP
ZIEGLER, JF
KELLER, J
[J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 566 - 568
[4] N-15 HYDROGEN PROFILING - SCIENTIFIC APPLICATIONS
LANFORD, WA
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 1 - 8
[5] GLASS HYDRATION - METHOD OF DATING GLASS OBJECTS
LANFORD, WA
[J]. SCIENCE, 1977, 196 (4293) : 975 - 976
[6] TECHNIQUE FOR MEASURING HYDROGEN CONCENTRATION VERSUS DEPTH IN SOLID SAMPLES
LEICH, DA
TOMBRELLO, TA
[J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 108 (01): : 67 - 71
[7] ION-IMPLANTATION FOR INSITU QUANTITATIVE ION MICROPROBE ANALYSIS
LETA, DP
MORRISON, GH
[J]. ANALYTICAL CHEMISTRY, 1980, 52 (02) : 277 - 280
[8] DEPTH DISTRIBUTIONS OF LOW-ENERGY DEUTERIUM IMPLANTED INTO SILICON AS DETERMINED BY SIMS
MAGEE, CW
COHEN, SA
VOSS, DE
BRICE, DK
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 383 - 387
[9] PROFILING HYDROGEN IN MATERIALS USING ION-BEAMS
ZIEGLER, JF
WU, CP
WILLIAMS, P
WHITE, CW
TERREAULT, B
SCHERZER, BMU
SCHULTE, RL
SCHNEID, EJ
MAGEE, CW
LIGEON, E
LECUYER, J
LANFORD, WA
KUEHNE, FJ
KAMYKOWSKI, EA
HOFER, WO
GUIVARCH, A
FILLEUX, CH
DELINE, VR
EVANS, CA
COHEN, BL
CLARK, GJ
CHU, WK
BRASSARD, C
BLEWER, RS
BEHRISCH, R
APPLETON, BR
ALLRED, DD
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 19 - 39

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