NITRIDING MECHANISMS IN AR-N2, AR-N2-H2 AND AR-NH3 MIXTURES IN DC GLOW-DISCHARGES AT LOW-PRESSURES (LESS THAN 10 TORR)

被引：26

作者：

AVNI, R ^{[1
]}

SPALVINS, T ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

MATERIALS SCIENCE AND ENGINEERING | 1987年 / 95卷

关键词：

D O I：

10.1016/0025-5416(87)90515-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：237 / 246

页数：10

共 11 条

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