INTERACTIONS OF ION-BEAMS WITH SURFACES - REACTIONS OF NITROGEN WITH SILICON AND ITS OXIDES

[1] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .1. SYSTEM SPECIFICATION AND DESIGN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02): : 591 - 595

[2] XPS AND UPS STUDIES OF INTERACTION OF NITROGEN-CONTAINING MOLECULES WITH NICKEL - USE OF BINDING-ENERGY PATTERNS AND RELATIVE INTENSITIES TO DIAGNOSE SURFACE SPECIES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 301 - 309

[3] XPS AND UPS STUDIES OF ADSORPTION OF SMALL MOLECULES ON POLYCRYSTALLINE NI FILMS [J]. FARADAY DISCUSSIONS, 1975, 60 : 51 - 70

[4] HELIUM 30.4 NM PHOTON SOURCE FOR PHOTOELECTRON-SPECTROSCOPY [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 5 (NOV-D) : 783 - 789

[5] Carlson T. A., 1972, Journal of Electron Spectroscopy and Related Phenomena, V1, P161, DOI 10.1016/0368-2048(72)80029-X

[6] X-RAY PHOTOELECTRON STUDY OF SOME SILICON-OXYGEN COMPOUNDS [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1977, 10 (02) : 85 - 91

[7] Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9

[8] VIBRATIONAL STRUCTURE IN DIATOMIC PHOTOELECTRON-SPECTRA - APPLICATION TO CS, PN, SIO AND P-2 [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1977, 10 (02) : 137 - 145

[9] ENERGY-DEPENDENCE OF REACTIONS OF ATOMIC TRITIUM WITH 1-CHLOROBUTANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1974, 60 (06) : 2568 - 2569

[10] ELECTRON MEAN ESCAPE DEPTHS FROM X-RAY PHOTOELECTRON-SPECTRA OF THERMALLY OXIDIZED SILICON DIOXIDE FILMS ON SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 305 - 308

[1] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .1. SYSTEM SPECIFICATION AND DESIGN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02): : 591 - 595

[2] XPS AND UPS STUDIES OF INTERACTION OF NITROGEN-CONTAINING MOLECULES WITH NICKEL - USE OF BINDING-ENERGY PATTERNS AND RELATIVE INTENSITIES TO DIAGNOSE SURFACE SPECIES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 301 - 309

[3] XPS AND UPS STUDIES OF ADSORPTION OF SMALL MOLECULES ON POLYCRYSTALLINE NI FILMS [J]. FARADAY DISCUSSIONS, 1975, 60 : 51 - 70

[4] HELIUM 30.4 NM PHOTON SOURCE FOR PHOTOELECTRON-SPECTROSCOPY [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 5 (NOV-D) : 783 - 789

[5] Carlson T. A., 1972, Journal of Electron Spectroscopy and Related Phenomena, V1, P161, DOI 10.1016/0368-2048(72)80029-X

[6] X-RAY PHOTOELECTRON STUDY OF SOME SILICON-OXYGEN COMPOUNDS [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1977, 10 (02) : 85 - 91

[7] Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9

[8] VIBRATIONAL STRUCTURE IN DIATOMIC PHOTOELECTRON-SPECTRA - APPLICATION TO CS, PN, SIO AND P-2 [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1977, 10 (02) : 137 - 145

[9] ENERGY-DEPENDENCE OF REACTIONS OF ATOMIC TRITIUM WITH 1-CHLOROBUTANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1974, 60 (06) : 2568 - 2569

[10] ELECTRON MEAN ESCAPE DEPTHS FROM X-RAY PHOTOELECTRON-SPECTRA OF THERMALLY OXIDIZED SILICON DIOXIDE FILMS ON SILICON [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 305 - 308