SURFACE RECONSTRUCTION AND INTERFACE FORMATION IN SI AND GAAS

被引：15

作者：

KATNANI, AD

STOFFEL, NG

EDELMAN, HS

MARGARITONDO, G

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571051

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：290 / 293

页数：4

共 35 条

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