THE SPLIT-CROSS-BRIDGE RESISTOR FOR MEASURING THE SHEET RESISTANCE, LINEWIDTH, AND LINE SPACING OF CONDUCTING LAYERS

被引：9

作者：

BUEHLER, MG

HERSHEY, CW

机构：

[1] CALTECH,JET PROP LAB,GAAS IC DESIGN & PROD ASSURANCE PROGRAM,PASADENA,CA 91109

[2] CALTECH,JET PROP LAB,VLSI TECHNOL GRP,PASADENA,CA 91109

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1986年 / 33卷 / 10期

关键词：

D O I：

10.1109/T-ED.1986.22709

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1572 / 1579

页数：8

共 12 条

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[2]

BALLARD B, 1980, NBS CERTIFICATE STAN

[3] BRIDGE AND VAN-DER-PAUW SHEET RESISTORS FOR CHARACTERIZING LINE-WIDTH OF CONDUCTING LAYERS [J].

BUEHLER, MG ;

GRANT, SD ;

THURBER, WR .

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[4] EXPERIMENTAL-STUDY OF VARIOUS CROSS SHEET RESISTOR TEST STRUCTURES [J].

BUEHLER, MG ;

THURBER, WR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (04) :645-650

[5]

BUEHLER MG, 1979, SOLID STATE TECH OCT, P89

[6] NUMERICAL-ANALYSIS OF VARIOUS CROSS SHEET RESISTOR TEST STRUCTURES [J].

DAVID, JM ;

BUEHLER, MG .

SOLID-STATE ELECTRONICS, 1977, 20 (06) :539-543

[7]

Hall P.M., 1968, THIN SOLID FILMS, V1, P277, DOI [10.1016/0040-6090(68)90046-1, DOI 10.1016/0040-6090(68)90046-1]

[8]

HASAN TF, 1985, TEST MEASUREMENT WOR, V5, P78

[9]

LINHOLM LW, 1985, 3RD P INT S VLSI INT, P299

[10]

NYYSSONEN D, 1980, SPIE, V221, P119

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