DESIGN AND PERFORMANCE OF AN INEXPENSIVE SUBSTRATE HEATER FOR OFF-AXIS THIN-FILM DEPOSITION

被引：8

作者：

APPLEYARD, NJ

JACKSON, TJ

WELCH, RG

PALENQUE, ER

PALMER, SB

机构：

[1] Department of Physics, University of Warwick

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1995年 / 6卷 / 03期

关键词：

D O I：

10.1088/0957-0233/6/3/016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The design and performance of a substrate heater intended for use in depositing thin films by, for example, laser ablation deposition is presented. The heater, which is simple and inexpensive to make, employs radiative heating so that the substrate may be rotated during film deposition if desired. Examples of films grown using the described heater are given.

引用

页码：337 / 340

页数：4

共 6 条

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[2] MAGNETIC AND STRUCTURAL CHARACTERISTICS OF PULSED-LASER DEPOSITED EPITAXIAL Y3FE5O12 FILMS
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[3] OFF-AXIS LASER DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS
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SCHULTZ, L
BAUER, P
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[J]. APPLIED PHYSICS LETTERS, 1992, 61 (26) : 3178 - 3180
[4] OXIDE SUPERCONDUCTOR AND MAGNETIC METAL THIN-FILM DEPOSITION BY PULSED-LASER ABLATION - A REVIEW
JACKSON, TJ
PALMER, SB
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1994, 27 (08) : 1581 - 1594
[5] DESIGN AND PERFORMANCE OF A SIMPLE SUBSTRATE HEATER FOR IN-SITU DEPOSITION OF HIGH-T(C) SUPERCONDUCTING THIN-FILMS
KUMAR, V
GUPTA, AK
[J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 1993, 4 (07) : 790 - 792
[6] OTSUBO S, 1990, JPN J APPL PHYS, V29, P133

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