X-RAY PHOTOELECTRON-SPECTROSCOPY OBSERVATIONS OF ARGON-ION BOMBARDMENT EFFECTS ON PHASE SEPARATED STRUCTURES SUCH AS SINX ALLOYS OR SI/SI3N4 INTERFACES

被引：43

作者：

KUBLER, L

HAUG, R

HLIL, EK

BOLMONT, D

GEWINNER, G

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 05期

关键词：

D O I：

10.1116/1.574070

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2323 / 2327

页数：5

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