CHARACTERIZATION AND MODIFICATION OF AMORPHOUS-CARBON FILMS CONSISTING OF SP(2) AND SP(3) BONDS USING MAGNETO-PLASMA DYNAMIC ARC-JET

被引：36

作者：

TANABE, Y ^{[1
]}

BURKHARD, G ^{[1
]}

ISHIKURA, T ^{[1
]}

TSUNODA, K ^{[1
]}

HASUO, H ^{[1
]}

TAMARU, M ^{[1
]}

TAMURA, H ^{[1
]}

SAWAOKA, A ^{[1
]}

UEMATSU, K ^{[1
]}

机构：

[1] ISHIKAWAJIMA HARIMA HEAVY IND CO LTD,RES INST,YOKOHAMA,KANAGAWA 235,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 12A期

关键词：

AMORPHOUS CARBON FILM; SP(2) AND SP(3) BONDS; MAGNETOPLASMA DYNAMIC ARC-JET; SUBSTRATE TEMPERATURE; C-13-NMR SPECTROSCOPY; X-RAY PHOTOELECTRON SPECTROSCOPY; FT-IR SPECTROSCOPY; HARDNESS;

D O I：

10.1143/JJAP.33.6684

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A magneto plasma dynamic are-jet (MPD arc-jet) can introduce a large energy pulse to a source gas and enable synthesis amorphous carbon films consisting of sp(2) and sp(3) bonds (hybrid amorphous carbon). The process condi tions which affect the structure and the properties of the synthesized films are described here. Homogeneous films were obtained using the MPD are-jet technique. Films were also in-situ, modified with modifier gases due to the excellent characteristics of the MPD are-jet. A substrate temperature of 200 degrees C and a bias potential of -200 V resulted in harder films. The hardness are related to the hydrogen content and chemical bond nature of the carbon in the films, Homogeneity in the deposition direction could be achieved by in-situ modification, The refractive index, hardness, and other properties of the films were controlled by this modification.

引用

页码：6684 / 6690

页数：7

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