VACUUM-EVAPORATED CONDUCTING ZNS FILMS

Conductive crystalline films of ZnS have been deposited by coevaporating ZnS and Al, or In. As-deposited conductive films have been obtained on occasion. Conductive films are consistently obtained with heat treatment subsequent to deposition. Typically, film resistivities are in the range 1-10 Ω cm. Hall mobilities on the order of 775 cm2 V-1 sec-1 have been measured. The results reported here suggest that with improved control of deposition parameters, conductive crystalline ZnS films can be obtained (as deposited) with two-source thermal evaporation.