CHARACTERIZATION OF GAAS SELF-ALIGNED REFRACTORY-GATE METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR (MESFET) INTEGRATED-CIRCUITS

被引:14
作者
MAGERLEIN, JH [1 ]
WEBB, DJ [1 ]
CALLEGARI, A [1 ]
FEDER, JD [1 ]
FRYXELL, T [1 ]
GUTHRIE, HC [1 ]
HOH, PD [1 ]
MITCHELL, JW [1 ]
POMERENE, ATS [1 ]
SCONTRAS, S [1 ]
SPIERS, GD [1 ]
GREINER, JH [1 ]
机构
[1] IBM CORP, GTD E FISHKILL FACIL, HOPEWELL JUNCTION, NY 12533 USA
关键词
D O I
10.1063/1.337808
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:3080 / 3092
页数:13
相关论文
共 42 条
[1]  
ANDERSON CE, UNPUB
[2]  
ANDERSON CJ, 1986, 1986 GAAS IC S NEW Y, P155
[3]   PIEZOELECTRIC EFFECTS IN GAAS-FETS AND THEIR ROLE IN ORIENTATION-DEPENDENT DEVICE CHARACTERISTICS [J].
ASBECK, PM ;
LEE, CP ;
CHANG, MCF .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (10) :1377-1380
[4]  
Braslau N., 1984, I PHYS C SER, V74, P269
[5]  
BRASLAU N, UNPUB
[6]   WSIO.11 SCHOTTKY GATES FOR GAAS METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS [J].
CALLEGARI, A ;
SPIERS, GD ;
MAGERLEIN, JH ;
GUTHRIE, HC .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (05) :2054-2058
[7]   UNIFORM AND THERMALLY STABLE AUGENI OHMIC CONTACTS TO GAAS [J].
CALLEGARI, A ;
PAN, ETS ;
MURAKAMI, M .
APPLIED PHYSICS LETTERS, 1985, 46 (12) :1141-1143
[8]   ELECTRICAL AND THERMAL-STABILITY OF AUGENI OHMIC CONTACTS TO GAAS FABRICATED WITH INSITU RF SPUTTER CLEANING [J].
CALLEGARI, A ;
LACEY, D ;
PAN, ETS .
SOLID-STATE ELECTRONICS, 1986, 29 (05) :523-527
[9]  
CARL A, UNPUB
[10]   ROLE OF THE PIEZOELECTRIC EFFECT IN DEVICE UNIFORMITY OF GAAS INTEGRATED-CIRCUITS [J].
CHANG, MF ;
LEE, CP ;
ASBECK, PM ;
VAHRENKAMP, RP ;
KIRKPATRICK, CG .
APPLIED PHYSICS LETTERS, 1984, 45 (03) :279-281