MEASUREMENT OF SPUTTERING BY SPUTTER DEPOSITION METHOD

被引：5

作者：

HUANG, W

机构：

来源：

PHYSICS LETTERS A | 1989年 / 134卷 / 04期

关键词：

D O I：

10.1016/0375-9601(89)90409-X

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：269 / 271

页数：3

共 23 条

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[7]

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[8]

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