THE ANGULAR-DISTRIBUTION AND CHARGED FRACTION OF ARGON SPUTTERED TUNGSTEN

被引:3
作者
EMMOTH, B
机构
来源
PHYSICA SCRIPTA | 1981年 / 24卷 / 03期
关键词
D O I
10.1088/0031-8949/24/3/017
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:609 / 612
页数:4
相关论文
共 14 条
[1]   COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J].
ALMEN, O ;
BRUCE, G .
NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :257-278
[2]  
Chu WK., 1978, BACKSCATTERING SPECT
[3]   ANGULAR-DISTRIBUTIONS OF SPUTTERED MO AND AG DURING HE+ AND AR+ ION-BOMBARDMENT [J].
EMMOTH, B ;
FRIED, T ;
BRAUN, M .
JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) :129-135
[4]  
GREGG R, 1977, RAD EFF, V35, P243
[5]   ON MECHANISM OF SPUTTERING [J].
LEHMANN, C ;
SIGMUND, P .
PHYSICA STATUS SOLIDI, 1966, 16 (02) :507-&
[6]   SINGLE-CRYSTAL SPUTTERING INCLUDING CHANNELING PHENOMENON [J].
ONDERDELINDEN, D .
CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :739-+
[7]   ANGULAR EFFECTS IN THE SPUTTERING OF CR+ FROM STAINLESS-STEEL BY 10-KEV H-3(+) [J].
SMITH, JN .
JOURNAL OF NUCLEAR MATERIALS, 1979, 80 (02) :356-360
[8]   ANGULAR DISTRIBUTION OF SPUTTERED POTASSIUM ATOMS [J].
STEIN, RP ;
HURLBUT, FC .
PHYSICAL REVIEW, 1961, 123 (03) :790-&
[9]   THE SPUTTERING YIELD OF POLYCRYSTALLINE MATERIALS [J].
TORTORELLI, PF ;
ALTSTETTER, CJ .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 51 (3-4) :241-248
[10]  
WASSERMAN G, 1962, TEXTUREN METALLISCHE