EFFECT OF OXYGEN ON ELECTRICAL-PROPERTIES OF SILICON

被引:12
作者
GLOWINKE, TS
WAGNER, JB
机构
[1] NORTHWESTERN UNIV,CTR MAT RES,EVANSTON,IL 60201
[2] NORTHWESTERN UNIV,DEPT MAT SCI & ENGN,EVANSTON,IL 60201
关键词
D O I
10.1016/0022-3697(77)90196-2
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:963 / 970
页数:8
相关论文
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