SIMPLE METHOD FOR FABRICATING LINES OF 0.15-MU WIDTH USING OPTICAL LITHOGRAPHY

被引：16

作者：

JELKS, EC

KERBER, GL

WILCOX, HA

机构：

来源：

APPLIED PHYSICS LETTERS | 1979年 / 34卷 / 01期

关键词：

D O I：

10.1063/1.90586

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：28 / 30

页数：3

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