SUBMICROMETER SALICIDE CMOS DEVICES WITH SELF-ALIGNED SHALLOW DEEP JUNCTIONS

被引：5

作者：

LU, CY

SUNG, JJ

YU, CHD

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1989年 / 10卷 / 11期

关键词：

D O I：

10.1109/55.43112

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：487 / 489

页数：3

共 11 条

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