EFFECT OF A DECLINATION ANGLE OF SUBSTRATE POSITION ON MAGNETRON SPUTTER DEPOSITION FROM A YBA2CU3O7-X TARGET

被引：14

作者：

KAGEYAMA, Y

TAGA, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 10期

关键词：

D O I：

10.1063/1.102456

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1035 / 1037

页数：3

共 17 条

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[17]

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