CHARACTERIZATION OF ELECTRONIC DEVICES AND MATERIALS BY SURFACE-SENSITIVE ANALYTICAL TECHNIQUES

被引：21

作者：

HOLLOWAY, PH ^{[1
]}

MCGUIRE, GE ^{[1
]}

机构：

[1] TEKTRONIX INC, MAT CHARACTERIZAT LAB, PORTLAND, OR 97077 USA

来源：

APPLICATIONS OF SURFACE SCIENCE | 1980年 / 4卷 / 3-4期

关键词：

D O I：

10.1016/0378-5963(80)90088-4

中图分类号：

学科分类号：

摘要：

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页码：410 / 444

页数：35

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