FORMATION OF PARA-NORMAL JUNCTIONS AND OHMIC CONTACTS AT LASER PROCESSED PT-SI SURFACE-LAYERS

被引：5

作者：

DOHERTY, CJ

SEIDEL, TE

LEAMY, HJ

CELLER, GK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.327933

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2718 / 2721

页数：4

共 15 条

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[3]

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[6] SPATIALLY CONTROLLED CRYSTAL REGROWTH OF ION-IMPLANTED SILICON BY LASER IRRADIATION [J].

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[7]

Chu Wei-Kan, 1978, BACKSCATTERING SPECT, P54

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[9] LASER-INDUCED REACTIONS OF PLATINUM AND OTHER METAL-FILMS WITH SILICON [J].

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APPLIED PHYSICS LETTERS, 1978, 33 (11) :918-920

[10]

POATE JM, 1979, LASER SOLID INTERACT, P527

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