ELUCIDATION OF THE INITIAL-STAGES OF THE OXIDATION OF SI(111) USING SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY

被引:79
作者
LYO, IW
AVOURIS, P
SCHUBERT, B
HOFFMANN, R
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,DIV RES,YORKTOWN HTS,NY 10598
[2] CORNELL UNIV,DEPT CHEM,ITHACA,NY 14853
[3] CORNELL UNIV,CTR MAT SCI,ITHACA,NY 14853
关键词
D O I
10.1021/j100374a009
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We use scanning tunneling microscopy, atom-resolved tunneling spectroscopy, and electronic structure calculations to determine the nature of the adsorption state of oxygen in the initial stages of the oxidation of Si(111). We are able to directly image two states of adsorbed oxygen. One of them is identified as a Si adatom site with one oxygen atom inserted in one of the back bonds, while the other involves an oxygen atom tying up the adatom dangling bond with, most likely, another oxygen inserted in one of the back bonds. As the coverage is increased toward the monolayer, the latter site becomes the dominant one. © 1990 American Chemical Society.
引用
收藏
页码:4400 / 4403
页数:4
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