ION-BEAM ETCHING OF GROOVE PATTERNS INTO GARNET FILMS

被引：15

作者：

KRUMME, JP ^{[1
]}

DIMIGEN, H ^{[1
]}

机构：

[1] PHILIPS FORSCH LAB HAMBURG GMBH,HAMBURG,WEST GERMANY

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1973年 / MAG9卷 / 03期

关键词：

D O I：

10.1109/TMAG.1973.1067664

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：405 / 408

页数：4

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