ELLIPSOMETRIC ANALYSIS FOR SURFACE-ROUGHNESS AND TEXTURE

被引：61

作者：

NEE, SMF

机构：

来源：

APPLIED OPTICS | 1988年 / 27卷 / 14期

关键词：

D O I：

10.1364/AO.27.002819

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

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页码：2819 / 2831

页数：13

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