ELLIPSOMETRIC MEASUREMENTS ON TANTALUM AND TANTALUM OXIDE-FILMS AND VARIATION OF OPTICAL-CONSTANTS WITH STRUCTURE

被引：5

作者：

AGUADOBOMBIN, RM ^{[1
]}

NEAL, WEJ ^{[1
]}

机构：

[1] UNIV ASTON,BIRMINGHAM B4 7ET,WARWICKSHIRE,ENGLAND

来源：

关键词：

D O I：

10.1016/0040-6090(77)90081-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：91 / 96

页数：6

共 13 条

[1] Cabrera N., 1949, REP PROG PHYS, V12, P308
[2] ELLIPSOMETRIC INVESTIGATION OF ELECTROOPTIC AND ELECTROSTRICTIVE EFFECTS IN ANODIC TA2O5 FILMS
CORNISH, WD
YOUNG, L
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1973, 335 (1600): : 39 - 50
[3] DENBIGH RN, 1966, J APPL PHYS, V37, P12
[4] DRUDE P, 1900, ANN PHYSIK, V1, P556
[5] OPTICAL PROPERTIES OF SOME TRANSITION METALS
JUENKER, DW
LEBLANC, LJ
MARTIN, CR
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (02) : 164 - &
[6] FORMATION OF FCC BCC AND BETA-TANTALUM FILMS BY EVAPORATION
MARCUS, RB
QUIGLEY, S
[J]. THIN SOLID FILMS, 1968, 2 (5-6) : 467 - &
[7] ELLIPSOMETRY AND ITS APPLICATIONS TO SURFACE EXAMINATION
NEAL, WEJ
FANE, RW
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (05): : 409 - 416
[8] X-RAY ANALYSIS OF SPUTTERED FILMS OF BETA-TANTALUM AND BODY-CENTERED CUBIC TANTALUM
READ, MH
HENSLER, DH
[J]. THIN SOLID FILMS, 1972, 10 (01) : 123 - &
[9] THE OXIDATION OF TANTALUM AT 50-300-DEGREES-C
VERMILYEA, DA
[J]. ACTA METALLURGICA, 1958, 6 (03): : 166 - 171
[10] PHASE COMPOSITION AND CONDUCTIVITY OF SPUTTERED TANTALUM
WESTWOOD, WD
LIVERMORE, FC
[J]. THIN SOLID FILMS, 1970, 5 (5-6) : 407 - +