P(SI-MA)/2-NITROBENZYL CHOLATE - A 2-LEVEL, SOLUTION-INHIBITION, DEEP-UV RESIST SYSTEM

被引：6

作者：

REICHMANIS, E

SMITH, BC

SMOLINSKY, G

WILKINS, CW

机构：

来源：

关键词：

D O I：

10.1149/1.2100526

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：653 / 657

页数：5

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WILKINS, CW ;

CHANDROSS, EA .

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[4]

REICHMANIS E, 1984, P SOC PHOTO-OPT INST, V469, P38, DOI 10.1117/12.941775

[5]

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WILKINS, CW ;

REICHMANIS, E ;

CHANDROSS, EA .

[7]

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[8]

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