STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING

被引：41

作者：

GREENE, JE

WICKERSHAM, CE

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801

[3] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 08期

关键词：

D O I：

10.1063/1.323170

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3630 / 3639

页数：10

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