EPITAXIAL-GROWTH OF IN1-X GAX SB THIN-FILMS BY MULTITARGET RF SPUTTERING

被引：48

作者：

GREENE, JE

WICKERSHAM, CE

ZILKO, JL

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801

[3] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 06期

关键词：

D O I：

10.1063/1.323020

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2289 / 2297

页数：9

共 21 条

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[8] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR MICROVOLUME ELEMENTAL ANALYSIS [J].

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[9]

GREENE JE, TO BE PUBLISHED

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