DC AND RF MAGNETRON SPUTTER DEPOSITION OF NBN FILMS WITH SIMULTANEOUS CONTROL OF THE NITROGEN CONSUMPTION

被引：10

作者：

HEDBABNY, HJ

ROGALLA, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 06期

关键词：

D O I：

10.1063/1.341113

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2086 / 2090

页数：5

共 13 条

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[10] ROOM-TEMPERATURE DEPOSITION OF SUPERCONDUCTING NBN FOR SUPERCONDUCTOR-INSULATOR-SUPERCONDUCTOR JUNCTIONS [J].

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