THIN-FILM DEVICES ON DIELECTRIC SUBSTRATES

被引：12

作者：

MUELLER, CW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期

关键词：

D O I：

10.1116/1.1315779

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：147 / &

共 13 条

[1] SILICON-ON-SAPPHIRE COMPLEMENTARY MOS MEMORY CELLS [J].

ALLISON, JF ;

HEIMAN, FP ;

BURNS, JR .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1967, SC 2 (04) :208-&

[2] CARRIER TRANSPORT IN THIN SILICON FILMS [J].

DUMIN, DJ ;

ROBINSON, PH .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2759-&

[3] DEFORMATION OF AND STRESS IN EPITAXIAL SILICON FILMS ON SINGLE-CRYSTAL SAPPHIRE [J].

DUMIN, DJ .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (09) :2700-&

[4] DIFFUSED DIODES IN SILICON-ON-SAPPHIRE [J].

DUMIN, DJ ;

SILVER, RS .

SOLID-STATE ELECTRONICS, 1968, 11 (03) :353-+

[5] AUTODOPING OF SILICON FILMS GROWN EPITAXIALLY ON SAPPHIRE [J].

DUMIN, DJ ;

ROBINSON, PH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (05) :469-+

[6]

DUMIN DJ, 1969, IEEE T ELECTRON DEVI, VED16, P479

[7] SINGLE-CRYSTAL FILMS OF SILICON ON INSULATORS [J].

FILBY, JD ;

NIELSEN, S .

BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (10) :1357-&

[8] SILICON-ON-SAPPHIRE EPITAXIAL BIPOLAR TRANSISTORS [J].

HEIMAN, FP ;

ROBINSON, PH .

SOLID-STATE ELECTRONICS, 1968, 11 (04) :411-&

[9]

MANASEVIT HM, 1968, T METALL SOC AIME, V242, P465

[10] GROWN-FILM SILICON TRANSISTORS ON SAPPHIRE [J].

MUELLER, CW ;

ROBINSON, PH .

PROCEEDINGS OF THE IEEE, 1964, 52 (12) :1487-&

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