FABRICATION USING X-RAY NANOLITHOGRAPHY AND MEASUREMENT OF COULOMB-BLOCKADE IN A VARIABLE-SIZED QUANTUM-DOT

被引：6

作者：

BURKHARDT, M

SMITH, HI

ANTONIADIS, DA

ORLANDO, TP

MELLOCH, MR

RHEE, KW

PECKERAR, MC

机构：

[1] PURDUE UNIV,SCH ELECT ENGN,W LAFAYETTE,IN 47907

[2] USN,RES LAB,NANOELECTR PROC FACIL,WASHINGTON,DC 20375

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587481

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3611 / 3613

页数：3

共 5 条

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