FRAMED RECESSED OXIDE SCHEME FOR DISLOCATION-FREE PLANAR SI STRUCTURES

被引：19

作者：

MAGDO, I

BOHG, A

机构：

来源：

关键词：

D O I：

10.1149/1.2131594

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：932 / 936

页数：5

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[5]

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[7]

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[8]

MAGDO I, 1975, THESIS U BUDAPEST

[9]

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