SURFACE PASSIVATION OF SEMICONDUCTORS

被引：25

作者：

NICOLLIAN, EH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 05期

关键词：

D O I：

10.1116/1.1316388

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：S39 / +

页数：1

共 27 条

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