EFFECTS OF TEXTURE IN THE TITANIUM LAYER ON SOLID-STATE REACTIONS FOR AL/TI/SI AND AL/TIN/TI/SI SYSTEMS

被引：7

作者：

FUJIMURA, N ^{[1
]}

NISHIDA, N ^{[1
]}

ITO, T ^{[1
]}

NAKAYAMA, Y ^{[1
]}

机构：

[1] IND TECH CTR OKAYAMA PREFECTURE,IMAHO,OKAYAMA 6612,JAPAN

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1989年 / 108卷

关键词：

D O I：

10.1016/0921-5093(89)90416-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：153 / 157

页数：5

共 11 条

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[6] KRONBERG ML, 1949, T AM I MIN MET ENG, V185, P501
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[8] RESISTANCE INCREASE IN SMALL-AREA SI-DOPED AL-N-SI CONTACTS
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[9] TI AND V LAYERS RETARD INTERACTION BETWEEN AL FILMS AND POLYCRYSTALLINE SI
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[10] INTERACTION OF AL LAYERS WITH POLYCRYSTALLINE SI
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[J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (11) : 4678 - 4684

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